AN EFFICIENT FABRICATION PROCESS FOR A POLYMERIC CANTILEVER

Abstract

This paper discusses an effective manufacturing process for a polymer cantilever covered with conductive nano silver. The entire structure can be constructed additively using a printing process without using an etching process or a sacrificial layer. The manufactured cantilever has good linearity and forms a sub-millimeter air gap between itself and the substrate surface. The capacitance between the conductive cantilever and the electrode on the substrate can be used for fine operation of the capacitive dynamometer. It is expected that this process can effectively manufacture various types of sensors that measure mechanical strain in the cantilever structure.